Choosing a Control Method for a Mica Heating Plate in Automated Equipment
https://industrial-heat-source.dovetailscope.com/posts/glass-heater-applications-in-optical-and-display-equipment
In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry